AR/VR Sputter
AVS｜A High-Precision Sputtering Solution Built for Next-Generation Immersive Optics
AR/VR Sputter｜Precision Sputtering for Next-Generation Immersive OpticsA Next-Generation Optical Sputtering Platform Built for AR/VR/MR Immersive Devices
AR/VR/MR immersive devices have become core hardware of the metaverse era — from consumer-grade VR headsets, AR smart glasses, to enterprise-grade Mixed Reality (MR) devices. Optical modules are key components determining users' immersive experience. Yet AR/VR optical designs are extremely complex — Pancake lenses, Waveguides, Fresnel lenses, HMD display optics — every type of optical element poses extreme challenges to coating precision, uniformity, and multilayer capability.
The Dah Young Vacuum AVS (AR/VR Sputter) is built on Dah Young's proprietary ARMS high-precision sputtering platform, optimized specifically for high-difficulty AR/VR/MR optical component mass production. The AVS integrates a separated activated reactive sputtering architecture, 3D convex optical coating capability, dual ICP high-density plasma sources, and multilayer support — delivering industry-leading next-generation optical coating solutions for the metaverse industry.
3D Convex Optical Coating｜Perfectly Addressing Pancake and Fresnel Complex Geometries
The core challenge of AR/VR lenses is non-flat complex geometry — Pancake lenses' multi-fold optical paths, Fresnel lenses' concentric microstructures, and Waveguide grating microstructures each pose extreme challenges to coating step coverage capability. Conventional evaporation's directional deposition characteristics cannot achieve uniform coating on such complex structures.
The AVS combines the inherent high kinetic energy and excellent step coverage characteristics of sputtering with Dah Young's proprietary 3D curved fixture design — depositing uniform, stable, and repeatable optical films on non-flat, convex, and even microstructured substrates. Even on components with complex optical-path-folding structures such as Pancake lenses, the AVS maintains comprehensive uniformity within ±1% — ensuring AR/VR device visual quality and production yield.
Multilayer Support｜High Precision for Complex Optical Path Designs
AR/VR optical modules often require precise multilayer designs — Beam Splitters (semi-transmissive / semi-reflective films), wavelength-specific Dichroic Mirrors, Polarization Beam Splitters (PBS), anti-reflection + anti-glare composite films — each film system involves dozens or even hundreds of layers of precise stacking.
The AVS employs Dah Young's proprietary separated activated reactive sputtering architecture, achieving rapid alternating stacking of metal and oxide layers to complete 100+ layer multilayer structures. Single-layer thickness precision reaches ±0.5 nm, with center wavelength deviation controlled within ±0.5% — fully meeting AR/VR immersive optics' core requirements for accurate color, clear vision, and precise optical paths.
Dual ICP High-Density Plasma｜Ensuring Ultimate Film Quality for Optical Immersive Experience
AR/VR device lenses sit directly close to users' eyes — any minor coating defect or film unevenness is immediately noticed by users, directly affecting the immersive experience. The AVS comes standard-equipped with two sets of Dah Young in-house ICP inductively coupled plasma sources, delivering industry-leading gas dissociation and reaction efficiency — ensuring precise multilayer refractive index and long-term spectral stability.
The separated activated reactive architecture effectively suppresses conventional reactive sputtering's target poisoning problem, ensuring deposition-rate stability and film consistency over long process runs. For AR/VR — where 'user experience reigns supreme' — the AVS delivers the industry's only complete solution combining 3D curved capability, multilayer precision, and high film density.
Specifications
| Item | AVS-1650 |
|---|---|
| Product Line | Sputter Series — AR/VR Sputter |
| Chamber Specification | Ø1650 mm process chamber｜1650 platform |
| Substrate Material | High-refractive-index glass (Schott, Hoya series), resin optical substrates, specialty optical sheets |
| Coating Technology | Activated Reactive Magnetron Sputtering (ARMS-based)｜metal and reaction zones separated to overcome target poisoning |
| Sputter System | Multi-target sputter system｜high deposition rate + flexible multi-film configuration |
| Plasma Source | 2 sets Dah Young in-house ICP source｜high-efficiency dual plasma enhances film quality |
| Fixture Design | Rotational 3D curved fixture｜optimized for non-flat components such as Pancake lenses, Waveguides |
| Layer Stacking Capability | 100+ layer multilayer｜addressing complex optical designs |
| Thickness Precision | ± 0.5 nm (single layer)｜± 0.5% center wavelength precision (multilayer) |
| Thickness Uniformity | Within ± 1% (full load, including 3D curved surfaces) |
| Coating Materials | High/low refractive-index pairs (Ta₂O₅, Nb₂O₅, TiO₂, SiO₂), high-reflection metals (Ag, Al), specialty optical coating materials |
| Ultimate Vacuum | LL Chamber ≦ 8 × 10⁻³ Torr｜PR Chamber ≦ 5 × 10⁻⁶ Torr |
| Operation Mode | IPC fully automatic / manual mode｜designed for long-run continuous processing |
| Optional Modules | Custom fixtures / advanced plasma source |
※ The above represents standard configuration. Actual specifications can be customized to suit customer application requirements.
013D Convex Optical Coating Capability
- High-Kinetic-Energy Sputtering: Sputtered particles' high kinetic energy and excellent step coverage suit complex structure coating such as Pancake and Waveguide.
- 3D Curved Fixture: Rotational 3D fixtures designed specifically for non-flat optical components, ensuring uniform coating on complex geometric structures.
- Comprehensive Uniformity ±1%: Even on 3D convex structures, full-load thickness uniformity stays within ±1%.
02Multilayer Support
- 100+ Layer Stacking: Capable of completing 100+ layer multilayer structures, meeting complex AR/VR optical design requirements.
- High-Precision Control: Single-layer thickness ±0.5 nm precision, center wavelength ±0.5% deviation — ensuring accurate optical paths.
- Flexible Film Systems: Supports various complex optical film systems including Beam Splitter, Dichroic, PBS.
03Dual ICP High-Density Plasma Source
- Dual Plasma Configuration: Two ICP sources ensure reaction uniformity across large substrates, enhancing film quality consistency.
- High Dissociation Efficiency: Dah Young in-house ICP delivers industry-leading gas dissociation and reaction efficiency.
- Densified Film Quality: High activated reaction ensures dense multilayer structure, precise refractive index, and long-term spectral stability.
04Separated Activated Reactive Sputtering Architecture
- Target Poisoning Solution: Metal sputtering zone separated from reactive plasma zone — solving target poisoning at its root.
- Long-Term Stability: High-speed rotating chamber ensures deposition-rate stability and film consistency over long process runs.
- High Deposition Rate Throughput: Balances high deposition rate with stable long-duration operation, suitable for AR/VR mass production.
05Low-Particle Process Design
- Low-Particle Architecture: Separated architecture and optimized flow design effectively suppress process particle generation.
- High Cleanliness: Ensures AR/VR lens surface cleanliness, avoiding impact on user visual experience.
- High-Yield Production: Stable particle levels ensure batch-to-batch yield consistency in large-scale mass production.
Combining 3D convex optical coating, Super Lattice multilayer, and dual ICP high-density plasma sources, the AVS delivers industry-leading high-precision sputtering solutions for various AR/VR/MR immersive device optical modules — broadly deployed across consumer-grade VR, enterprise MR, AR smart glasses, and other core metaverse hardware.
01VR Head-Mounted Displays
VR headsets are today's most important consumer-grade device in the metaverse industry. Pancake lens designs have become the mainstream optical solution for next-generation VR — substantially reducing device thickness while improving visual quality. The AVS's 3D convex coating capability and multilayer precision perfectly support Pancake lens precision optical needs.
02AR Smart Glasses
AR smart glasses are the next-generation computing platform of the metaverse era — Waveguide technology has become the mainstream optical solution. The AVS's multilayer capability and high-precision thickness control fully support the precision film system requirements of Waveguide optical components.
03Mixed Reality Devices
MR mixed reality devices combine the advantages of VR and AR, simultaneously processing virtual image displays and real-world vision with extremely complex optical systems. The AVS's high-precision multilayer capability and 3D curved coating support the mass production needs of complex optical modules in MR devices.
04Optical Modules & Components
AR/VR systems rely on various optical module components — Fresnel lenses, freeform mirrors, diffractive grating elements — each requiring specialty coating support. The AVS's diverse film system capability provides complete coating solutions for AR/VR supply chain manufacturers.
05Next-Gen Display & Sensing
As the metaverse ecosystem continues to expand, emerging next-generation technologies — eye tracking, spatial computing sensing, holographic displays — pose new challenges for optical coatings. The AVS's flexible processes and high-precision capability provide critical process support for AR/VR innovative applications.
