Semiconductors

Dah Young Vacuum provides comprehensive coating solutions tailored to the semiconductor industry, spanning from wafer fabrication to backend packaging and testing.Our two core technology platforms—Hard Coating Series (DYHC) and Optical Coating Series (ALD / ORBIS / DMC)—offer full-spectrum support for critical process modules, high-precision component enhancement, and thin film accuracy control. These solutions help improve process yield and product reliability across advanced semiconductor applications.

Hard Coating Solutions | DYHC Series

The DYHC series delivers high-performance hard coatings via two advanced technologies: DLC (Diamond-Like Carbon) and HiPIMS (High Power Impulse Magnetron Sputtering), ideal for wafer handling parts, test sockets, and probe cards.

DLC Series: Combines high hardness and low friction to reduce wear, prevent static damage, and extend the lifetime of reusable components in semiconductor testing and packaging.
HiPIMS Series: Offers ultra-dense, high-adhesion films with excellent smoothness and microstructure control—ideal for functional protective coatings under miniaturization and high-reliability demands.

Optical Coating Solutions | ALD / ORBIS / DMC Series

ALD (Atomic Layer Deposition) System

Delivers atomic-level thickness control with excellent step coverage, ideal for high aspect ratio structures and nanostructures. Suitable for barrier layers, dielectric coatings, and moisture-proof or corrosion-resistant applications requiring ultra-precise uniformity.

ORBIS Ion-Activated Reactive Sputtering System

Combines horizontal chamber design with ion activation technology to suppress particle generation and improve layer purity. Capable of depositing over 50 layers with excellent stack uniformity—ideal for optical filters, reflectors, and sensor protection layers.

DMC Electron Beam Evaporation System

Integrates electron beam evaporation, optical monitoring, and ion-assisted modules. Offers high deposition rates and superior film quality. Suitable for dielectric, conductive, and reflective metal layers across both R&D and volume production.

All systems are integrated with Dah Young’s proprietary smart software suite:

Fast™ Uniformity Simulation
Coating Guard™ Optical Monitoring
Plasma Guard™ Plasma Monitoring

These tools enable real-time control, enhanced process stability, and accelerated production ramp-up—empowering semiconductor customers to meet ever-evolving technology demands with confidence.

Coating Applications in the Semiconductor Industry:

Optical Coating:

TGV, Power Device, MEMS, RF Component, Structured Light Transmitter & Receiver, Ambient Light Sensor, Time-of-Flight Sensor, CMOS Image Sensor

Hard Coating:

Chip Bonding Machine molds, Inspection fixtures, Disposable blades for pathology slicing machines