• ARMS｜Precision Optical Coating Redefined with Activated Reactive Magnetron Sputtering

Beyond its longstanding expertise in optical evaporation systems, Dah Young Vacuum introduces its proprietary innovation—ARMS (Activated Reactive Magnetron Sputtering Coating Machine)—a coating solution designed specifically for high-end optical applications. By reengineering conventional reactive sputtering, ARMS breaks through two major limitations of target poisoning: low deposition rates and unstable discharge, both of which compromise film quality and production efficiency.

ARMS employs a high-speed rotating chamber design that strategically separates the interaction between sputtered metal and reactive gases. During operation, substrates rapidly alternate between the metal target area and the reactive plasma zone, enabling the fast, layered stacking of metal and oxide films. This unique approach supports continuous, stable, and high-efficiency production, ideal for temperature-sensitive substrates thanks to its low-temperature sputtering capability.

Key advantages of the ARMS system include:

1. Low-temperature deposition suitable for delicate substrates.
2. High-efficiency ICP (Inductively Coupled Plasma) source, enhancing reactivity and coating performance.
3. Minimized particle generation, ensuring excellent uniformity and surface cleanliness.

ARMS sets a new benchmark in optical sputtering technology—delivering superior film quality, production stability, and process flexibility for today’s most demanding optical coating applications.

• From Flat to Curved: ARMS Delivers Full-Surface Optical Coating Precision

The ARMS system features distinct zones for the target material and the activated plasma source—also known as the coupled plasma region. By separately introducing inert and activated reactive gases, ARMS minimizes target poisoning during sputtering, ensuring exceptional process stability and consistent film quality across large areas. Its high kinetic energy and superior step coverage allow ARMS to deposit uniform, high-performance coatings even on complex, non-flat substrates. This makes it an ideal solution for advanced optical applications such as in-vehicle camera lenses used in autonomous vehicles and 3D-curved optics for AR/VR/MR devices.

• Flexible Configuration and Multilayer Stacking—Enhancing Optical Sputtering Capabilities

Dah Young Vacuum integrates advanced sputtering processes into its optical coating systems, combining the advantages of sputtering with innovative engineering to achieve denser and more compact film layers. The system supports complex multilayer architectures, including superlattice structures exceeding 50 layers. The cavity design has adjustable multi-point target sites, allowing compatibility with a wide range of sputtering materials and metal targets. Flexible single- and dual-target configurations further enhance process adaptability. Additionally, pre-mixed process gases improve dissociation efficiency, increase reactive gas activation, and overcome the limitations of conventional reactive sputtering—delivering high deposition rates, exceptional film quality, and long-term process stability.

• Fully automatic control (IPC & PLC) enables the production of high-level optical films and composite multilayer optical films.
• The target material is easy to replace, and both single-target and dual-target configurations can be customized to greatly improve coating efficiency.
• The fully automated coating software allows for easy parameter setting. Optical design files can be directly imported, and spectrum simulation can be performed prior to deposition. The system also supports remote connection for real-time process monitoring.
• Complete process parameter files and historical records make it easy for users to access data for analysis and optimization. The data recording interval (in seconds) is adjustable.
• The machine is equipped with multiple emergency stop and shutdown systems to enhance operator safety. A transporter for convenient loading and unloading can also be integrated.
• A material substrate holder with a preload conveying chamber enables continuous high-volume production, supporting uninterrupted 24-hour operation.
  

Anti-reflection coatings, Edge filters, Minus filters, Beam splitter filters, Decorative film, Reflector, band pass filters…etc.