EB-IAD Optical Coating Machine
Optical films are widely used in various daily necessities. Through the stacking and design of materials with different refractive indexes, the optical interference phenomenon is used to produce various effects of light, and optical multilayer films with different functions.
The anti-reflection film can make the camera function of the mobile phone clearer and reduce the ghosting on the lens; the UV/IR cut-off filter can protect the operation of the sensor and related components, improve the image stability and increase the service life, and be applied to fingerprint unlocking under the screen. Optical coatings can achieve different purposes through multi-layer film stacking, or by increasing or decreasing in thickness. Therefore, filters with different functions can be designed according to requirements.
Dah Young's DMC-IAD series optical equipment has a unique optical monitoring system, which can measure the wide-wave domain spectrum in the chamber cavity to calculate the refractive index in vacuum, make tooling value calculation easier, and quickly correct the film parameters. The admittance trajectory algorithm can be used to easily compensate the film thickness error, and the film tangent point can be effectively selected to complete the high-quality film.
|
DMC 800 IAD |
DMC 1100 IAD |
DMC 1350 IAD |
DMC 1500 IAD |
Applicable substrate |
Glass, polymer substrate | |||
Coating Technology |
Thermal resistance boat evaporation, electron gun evaporation, ion source assisted coating |
|||
Coating Materials |
Oxide film:TiO2, Al2O3, SiO2, ZnO, Ta2O5, HfO2, ITO Metal film:Cu, Ag, Au, Al, Ti, Cr, Pt, Pd Nitride film:TiN, Si3N4 |
|||
Chamber Size/Diameter (mm) |
Ø800 |
Ø1100 |
Ø1350 |
Ø1500 |
Slewing Mechanism | Planetary rotation and revolution, Umbrella stand revolution | |||
Ultimate Vacuum (Torr) |
better than 5 x 10-7 |
better than 6 x 10-7 |
better than 6 x 10-7 |
better than 6 x 10-7 |
Pumping Rate |
Pumped from the atmosphere to 1 x 10-5 Torr for 15 minutes. |
|||
Number of electron guns |
2 |
|||
Quartz monitoring system |
Rotating 6-point |
|||
Optical monitoring system |
Reflective/transmissive, 350~1050 nm |
|||
Heating System | Up to 250 ° C (150 ° C within 30 minutes) | |||
Operation Interface | 17" touch screen industrial computer | |||
Operating System |
IPC+PLC automatic and manual control |
|||
Power Requirement (3ø 380V ) |
80 kVA |
80 kVA |
80 kVA |
120 kVA |
Cooling Water Demand |
100 L/min |
100 L/min |
150 L/min |
180 L/min |
Compressed Air Demand |
6~8 kg/cm² |
- IAD effectively improves the quality of thin films and increases the application areas of optical coatings.
- There are a variety of materials that can be plated, and there are few restrictions on the types of substrates.
- Process stability and high reproducibility.
- Automatic coating software, easy to set, can directly load stored optical design files, and spectrum of the analog.
- Complete process parameters and historical records are convenient for users to read historical data for analysis and optimization.
- Bilingual interface operation.
- Independent safety loop power supply and multiple emergency stop switch settings enhance the safety of operator and maintenance personnel.
Anti-reflection film, cut-off filter, band-pass filter etc., various filters