Magnetron Sputtering Coating Machine
Dah Young DYHC-S series sputtering coater has a unique power control system to form a stable bias voltage in the chamber cavity achieving excellent coating effects.
The independent power supply target design of DahYoung's DYHC-S series sputtering equipment improves the target utilization and ionization rate and can be combined with other technologies such as electron beam assist, magnetron sputtering, unbalanced sputter, RF sputter, HiPIMS to improve sputtering performance.
|Coating Substrate||Conductive metal|
|Coating Technology||DC sputtering|
Per customer requirements
|Coating Color||Per customer requirements|
|Chamber Material||Stainless steel SUS304|
|Operating system||IPC & PLC automatic and manual control.|
|Vendor brand||HUETTINGEL, Pfeiffer, Leybold or customer preferred.|
|Number of Planetary Axis||6~12 (Depending on the process)|
|Effective Coating Diameter (mm)||Ø960mm|
|Effective Coating Height (mm)||H850mm|
|Number of sputtering sources||6|
|Sputter power (kW)||20kW|
|Ultimate vacuum (Torr)||5*10-6 Torr|
|Power requirement||3 Phase/380V/170kW/50-60Hz|
- Fully automatic control (IPC & PLC).
- The low-position chamber cavity provides easy operator acceses.
- EU and CE safety standards and technical specifications available.
- PVD coating characteristics:
- High wear resistance
- Maintain high hardness at high operating temperature
- High oxidation resistance
- Low friction coefficient
- Scratch resistant
- Various surface colors
Metal decoration, hardware, hand tools, machining, molds,...etc.