Alpha-Step




Alpha-Step


Type:
Alpha-step IQ

Test piece size:

< 150x150 mm


Maximum scan length:

10 mm (resolution:0.01 µm@2 µm/s)


Maximum vertical range:

2000 μm (resolution:0.0119 Å@20 μm)


Scanning speed:

2 ~ 200 μm/s


Features:

Measurement of surface roughness and surface profile of test piece