Alpha-Step
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Alpha-Step |
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Type: |
Alpha-step IQ |
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Test piece size: |
< 150x150 mm |
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Maximum scan length: |
10 mm (resolution:0.01 µm@2 µm/s) |
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Maximum vertical range: |
2000 μm (resolution:0.0119 Å@20 μm) |
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Scanning speed: |
2 ~ 200 μm/s |
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Features: |
Measurement of surface roughness and surface profile of test piece |
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