Optical Ellipsometry System

Optical Ellipsometry System

M-2000UI/ J. A. Woolam

Light source:
(1) D2 (Deuterium) for UV/VIS
(2) QTH (Quartz Tungsten Halogen) for VIS/IR

Maximum measuring spot size:

about 5×15 mm2

Measurement band range:
190 ~ 1680 nm

Measuring angle:
(1) Ellipsometry parameters, reflection spectrum measurement:45 ~ 75°
(2) Transmission spectrum measurement:90°

The light wave is an electromagnetic wave. When a light wave is incident on the substrate obliquely, part of it will be reflected, part of it will be absorbed, and part of it will penetrate. The electric field of the incident wave has two plane components. The parallel incident component is called P-polarized aurora, and the perpendicular incident component is called S-polarized aurora. The polarization characteristics of light can be determined by the amplitude ratio Ψ and phase difference of the plane wave's S polarization and P polarization. (Δ decides). When a polarized light beam is reflected by the sample surface, it will cause changes in the amplitude and phase of the P and S polarized light. Using these two parameters, the refractive index, extinction coefficient and thickness of the film can be tested without destroying the surface characteristics of the sample. The obtained ellipse parameters use CompleteEASE 4.65 as the analysis software.

Specifications of samples to be tested and measurable items

  • Sample requirements
    1. Size: 2×2 cm2 ~ 20×20 cm2
    2. Types: Glass, Si Wafer, PET
    3. Types of thin film materials: dielectric materials, metal thin films, semiconductor materials, organic/inorganic thin films, etc.
    4. Film thickness range:
      • Dielectric film thickness range: 50 ~ 5000 nm
      • Metal film thickness range: 10 ~ 50 nm
      • other
  • Measurable items
    1. Material ellipsometric parameters (Ψ, Δ)
    2. Transmittance T
  • Additional analysis items (blank substrate must be provided)
    1. Single-layer organic/inorganic thin film optical constants (n, k...) analysis
    2. Substrate optical constants (n, k…) are established
    3. membrane thickness
    4. Analyze the trend of film surface roughness
    5. Mixed membrane analysis
    6. Multilayer film analysis (measure and analyze layer by layer)

Study Case

  • Al-doped ZnO (AZO) single-layer film measurement (M-2000UI/ J. A. Woolam) and optical constant analysis (CompleteEASE)

           (1) Single-layer film ellipsometric parameters and penetration measurement

AZO on B270 Glass ellipsometric parameter measurement results

AZO on B270 Glass transmittance measurement results

(2) Analysis of Optical Constants and Thickness of Single Layer Film


Fitting results of AZO on B270 Glass (ellipsometric parameters)

Fitting results of AZO on B270 Glass (penetrating light intensity)

Fitting results of AZO on B270 Glass (thickness and model)

Fitting results of AZO on B270 Glass (refractive index and extinction coefficient)