HiPIMS Coating Machine
High Power Impulse Magnetron Sputtering (HiPIMS) is a high-power pulsed power supply system used on magnetron sputtering coating technics. Compared to the traditional DC sputtering system, HiPIMS could generate tens of times higher pulsing current to obtain a ten thousand times higher-density electron plasma. Effectively enhancing the ionization rate to obtain a non-porous, high density crystallinity film at lower coating temperatures.
DAH YOUNG's DYHC HiPIMS series sputtering coater power supply and chamber cavity are designed to provide high plasma density (1018~19e-/m3) and high ionization rate (70~100%), increasing the substrate coating compactness, adhesion flatness and corrosion resistance. The lower duty cycle (<5%) results in a significant reduction in process temperature offering more substrate options on PEN, PET, etc. fiexible substrates.
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DYHC 900 HiPIMS |
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Coating Substrate |
Metal |
| Coating Technology |
HiPIMS high power pulsed magnetron sputtering |
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Coating Materials |
Depending on the process |
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Coating Color |
Depending on the process |
| Chamber Material |
Stainless steel SUS304 |
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Operating system |
IPC and PLC automatic and manual control |
| Chamber Diameter |
Ø900 mm |
| Chamber Height |
H900 mm |
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Number of Planetary Axis |
9 (Depending on the process) |
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Effective Coating Diameter |
Ø620 mm |
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Effective Coating Height |
H520 mm |
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Number of sputtering sources |
4~6 (Depending on the process) |
| HiPIMS power |
2000 V/1000 A/10 kW |
| Bias power supply |
1000 V/50 A/20 kW |
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Ultimate vacuum |
5 x 10-6 Torr |
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Process cycle |
Depending on the process |
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Power requirement |
3ø 380 V/125 kW/50-60 Hz |
- Fully automated control (IPC & PLC).
- Optional coating deposition methods (Cathode Arc, Magnetron Sputtering, Ion Source, HiPIMS) could be implemented to meet the customers coating requirements.
- The low-position chamber cavity provides easy operator access.
- EU and CE safety standards and technical specifications available.
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Features of PVD coating :
• High abrasion resistance
• Retains hardness under the high operating temperatures
• High oxidation resistance
• Low friction coefficient
• Anti-adhesion
• Scratch resistant
• Various surface colors
Optoelectronics, Semiconductors, Energy, Machining, Molds, Biomedicine, Micro drill needle, etc.
