• High Power Impulse Magnetron Sputter Coating Machine

High Power Impulse Magnetron Sputter Coating Machine


High Power Impulse Magnetron Sputtering (HiPIMS) is a high-power pulsed power supply system used on magnetron sputtering coating technics. Compared to the traditional DC sputtering system, HiPIMS could generate  tens of times higher pulsing current to obtain a ten thousand times higher-density electron plasma. Effectively enhancing-e  the ionization rate to obtain a non-porous, high density crystallinity film at lower coating temperatures.

DAH YOUNG's DYHC-H HiPIMS series sputtering coater power supply and chamber cavity are designed to provide, high plasma density (1018~19e-/m3) and high ionization rate (70~100%), increasing the substrate coating compactness. Hesion, flatness and corrosion resistance. The lower duty cycle (<5%) results in a significant reduction in process temperature more substrate options on PEN, PET, etc. fiexible substrates.

 Model  DYHC 1200 HiPIMS 
 Coating Substrate  Metal, ceramic, enamel, glass, plastic
 Coating Technology  HiPIMS high power pulsed magnetron sputtering
 Coating Materials  Per customer requirements
 Coating Color  Per customer requirements
 Chamber Material  Stainless steel SUS304
 Operating system  IPC and PLC automatic and manual control
 Chamber Diameter  Ø1200mm 
 Chamber  Height  H1200mm
 Number of Planetary Axis  6~12(Depending on the process)
 Effective Coating Diameter (mm)  Ø960mm 
 Effective Coating Height (mm)  H850mm
 Coating Deposition  Method  HiPIMS magnetron sputtering coating and cathodic arc coating
 Number of sputtering sources  6
 Sputter power (kW)  20kW
 Ultimate vacuum (Torr)  5*10-6 Torr
 Power requirement  3 Phase/380V/170kW/50-60Hz
  1. Fully automated control (IPC & PLC).
  2. Optional  coating deposition methods (Cathode Arc, Magnetron Sputtering, Ion Source, HiPIMS) could be implemented to meet the customers coating requirements.
  3. The low-position chamber cavity provides easy operator access.
  4. EU and CE  safety standards and technical specifications available.
  5. Features of PVD coating :
    • High abrasion resistance
    • Retains hardness under the high operating temperatures
    • High oxidation resistance
    • Low friction coefficient
    • Anti-adhesion
    • Scratch resistant
    • Various surface colors

Optoelectronics, Semiconductors, Energy, Machining, Molds, Biomedicine, Micro drill needle, etc.


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