• High Power Impulse Magnetron Sputter Coating Machine

High Power Impulse Magnetron Sputter Coating Machine

Model : DYHC-HiPIMS

High Power Impulse Magnetron Sputtering (HiPIMS) is a high-power pulsed power supply system used on magnetron sputtering coating technics. Compared to the traditional DC sputtering system, HiPIMS could generate  tens of times higher pulsing current to obtain a ten thousand times higher-density electron plasma. Effectively enhancing the ionization rate to obtain a non-porous, high density crystallinity film at lower coating temperatures.

DAH YOUNG's DYHC HiPIMS series sputtering coater power supply and chamber cavity are designed to provide high plasma density (1018~19e-/m3) and high ionization rate (70~100%), increasing the substrate coating compactness, adhesion flatness and corrosion resistance. The lower duty cycle (<5%) results in a significant reduction in process temperature offering more substrate options on PEN, PET, etc. fiexible substrates.



DYHC 900-HiPIMS
Coating Substrate
Metal
Coating Technology HiPIMS high power pulsed magnetron sputtering
Coating Materials
Depending on the process
Coating Color
Depending on the process
Chamber Material Stainless steel SUS304
Operating system
IPC and PLC automatic and manual control
Chamber Diameter Ø900 mm
Chamber Height H900 mm
Number of Planetary Axis
9 (Depending on the process)
Effective Coating Diameter
Ø620 mm
Effective Coating Height
H520 mm
Number of sputtering sources
4~6 (Depending on the process)
HiPIMS power 2000 V/1000 A/10 kW
Bias power supply 1000 V/50 A/20 kW
Ultimate vacuum
x 10-6 Torr
Process cycle
Depending on the process
Power requirement
 3ø 380 V/125 kW/50-60 Hz

  1. Fully automated control (IPC & PLC).
  2. Optional  coating deposition methods (Cathode Arc, Magnetron Sputtering, Ion Source, HiPIMS) could be implemented to meet the customers coating requirements.
  3. The low-position chamber cavity provides easy operator access.
  4. EU and CE  safety standards and technical specifications available.
  5. Features of PVD coating :
    • High abrasion resistance
    • Retains hardness under the high operating temperatures
    • High oxidation resistance
    • Low friction coefficient
    • Anti-adhesion
    • Scratch resistant
    • Various surface colors

Optoelectronics, Semiconductors, Energy, Machining, Molds, Biomedicine, Micro drill needle, etc.


      

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