High Power Impulse Magnetron Sputter Coating Machine
High Power Impulse Magnetron Sputtering (HiPIMS) is a high-power pulsed power supply system used on magnetron sputtering coating technics. Compared to the traditional DC sputtering system, HiPIMS could generate tens of times higher pulsing current to obtain a ten thousand times higher-density electron plasma. Effectively enhancing-e the ionization rate to obtain a non-porous, high density crystallinity film at lower coating temperatures.
DAH YOUNG's DYHC-H HiPIMS series sputtering coater power supply and chamber cavity are designed to provide, high plasma density (1018~19e-/m3) and high ionization rate (70~100%), increasing the substrate coating compactness. Hesion, flatness and corrosion resistance. The lower duty cycle (<5%) results in a significant reduction in process temperature more substrate options on PEN, PET, etc. fiexible substrates.
|Coating Substrate||Metal, ceramic, enamel, glass, plastic|
|Coating Technology||HiPIMS high power pulsed magnetron sputtering|
|Coating Materials||Per customer requirements|
|Coating Color||Per customer requirements|
|Chamber Material||Stainless steel SUS304|
|Operating system||IPC and PLC automatic and manual control|
|Number of Planetary Axis||6~12(Depending on the process)|
|Effective Coating Diameter (mm)||Ø960mm|
|Effective Coating Height (mm)||H850mm|
|Coating Deposition Method||HiPIMS magnetron sputtering coating and cathodic arc coating|
|Number of sputtering sources||6|
|Sputter power (kW)||20kW|
|Ultimate vacuum (Torr)||5*10-6 Torr|
|Power requirement||3 Phase/380V/170kW/50-60Hz|
- Fully automated control (IPC & PLC).
- Optional coating deposition methods (Cathode Arc, Magnetron Sputtering, Ion Source, HiPIMS) could be implemented to meet the customers coating requirements.
- The low-position chamber cavity provides easy operator access.
- EU and CE safety standards and technical specifications available.
Features of PVD coating :
• High abrasion resistance
• Retains hardness under the high operating temperatures
• High oxidation resistance
• Low friction coefficient
• Scratch resistant
• Various surface colors
Optoelectronics, semiconductors, energy, machining, molds, biomedicine, etc.